Surface chemical analysis. Glow discharge mass spectrometry. Operating procedures Ingestion-build-156411 Evacuation procedures

Evacuation procedures

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Surface chemical analysis. Glow discharge mass spectrometry. Operating procedures Ingestion-build-156411 Evacuation procedures1 Scope This document gives procedures for the operation and use of glow discharge mass spectrometry (GD MS). There are several GD MS systems from different manufacturers in use and this document describes the differences in their operating procedures when appropriate. NOTE This document is intended to be read in conjunction with the instrument manufacturers manuals and recommendations.