Thick Aluminum Nitride Substrate for RTP Furnace's Sample Holder - EQ-AIN-Holder Orientation 10-14 Vacuum chuck Dimensions: 370mm(L) x

Vacuum chuck Dimensions: 370mm(L) x 200mm(W)

Chemical Formula Na2Mn[Fe(CN)6] Powder Color Light Gery/White

Surface Roughness:   Fine ground

005 Cu (wt%) <0

Thick Aluminum Nitride Substrate for RTP Furnace's Sample Holder - EQ-AIN-Holder Orientation 10-14 Vacuum chuck Dimensions: 370mm(L) xSuch unpolished Aluminum Nitride can be placed in the center of holder for holding test samples up to 3" or 5" diam. The excellent temperature uniformity can be achieved in this 3" or 5" diam. area due to the benefit from its high thermal conductivity. Aluminum Nitride Ceramic Substrates Properties Item No. AIN Holder Purity (wt%) 99% (AN5116) Density (g cm3) >3. 26 Thermal Conductivity (W m. K) >170 Thermal Expansion (x10 6 oC) <4. 2 Dielectric