YSZ Single Crystal Substrate (100) 5x5x1.0mm, 1SP SiC (4H MTI is not responsible for

MTI is not responsible for oxiding by cutomer

Orientation:    (111) +/-3 o

This electrode sheet is based on Aluminum foil coated by S/C composite

Impurities Na (ppm)

YSZ Single Crystal Substrate (100) 5x5x1.0mm, 1SP SiC (4H MTI is not responsible forSpecifications: Single crystal: YSZ Size: 5 x 5 x 1. 0 mm + 0. 05 mm Orientation: (100) + 0. 5o Polish: one side polished, polished by CMP technology Surface roughness: < 5A RMS by AFM Typical Properties Chemical Formula Y2O3 stabilized ZrO2, 8 % mole Y2O3 Crystal Structure Cubic, Face Centered, CaF2 type Unit Cell a = 5. 125 A Density 5. 8 g cc Melting Point 2500 oC Thermal Expansion Coeff. 10. 3 ppm oC Dielectric Constant 27 Crystal Growth Technique