E02600 - SEMI E26 - Radial Cluster Tool Footprint Standard StdPbc-0818 This standard was technically approved

This standard was technically approved by the global Flat Panel Display – Factory Automation Committee

The final goal of this Standard is to realize the traceability of semiconductor

静電気の表面電荷は，半導体製造環境の中で多くの望ましくない効果を引き起こす。

• Equipment and load port access mode switching

E02600 - SEMI E26 - Radial Cluster Tool Footprint Standard StdPbc-0818 This standard was technically approvedThis standard was technically approved by the global Physical Interfaces & Carriers Committee and is the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition reapproved by the North American Regional Standards Committee on August 16 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1992; last published June 1999. NOTICE: This document was