E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange Revision:SEMI E83-1106 - Superseded Boron-Doped

Boron-Doped

SEMI E82-1104 (technical revision)

Figures 1 and 2 show examples of types of AMHS equipment

The specific format and protocol implementation of these interface specifications

E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange Revision:SEMI E83-1106 - Superseded Boron-DopedNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification is intended to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port. This Specification defines a mechanical standard for the stationary (equipment)