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Electronic Design Market Data (EDMD) - Subscription Edition StdPbc-0619 SEMI F15-93 (Reapproved 0699)
Electronic Design Market Data (EDMD) - Subscription Edition StdPbc-0619 SEMI F15-93 (Reapproved 0699)
$5450.00
Description
SEMI F15-93 (Reapproved 0699)
SEMI G63-95 (first published)
Boron trichloride is a colorless gas at room temperature and atmospheric pressure which fumes in the presence of moist air
本書は8 × 105 Pa （8気圧）以下の圧力下で特殊ガスシステムから供給される引火性ガスにのみ適用する。この方法は8 × 105 Pa （8気圧）以上の圧力で高圧シリンダから直接サンプリングを行う場合には適していない。本書は下記に示すガスにのみ適用される。
Electronic Design Market Data (EDMD) - Subscription Edition StdPbc-0619 SEMI F15-93 (Reapproved 0699)
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 - Subscription Edition StdPbc-0619 SEMI F15-93 (Reapproved 0699)){kind=link}
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