F01200 - SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle Revision:SEMI F12-0998 - Inactive specimen preparation

specimen preparation

and the amount of deformation induced to the wafer stack by the bonding process

and vaporizable materials that can be used in mass flow devices

SEMI MF1392-0307 (Reapproved 0512)

F01200 - SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle Revision:SEMI F12-0998 - Inactive specimen preparationNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This method provides a uniform procedure to determine the sealing capabilities of fluorocarbon resin fittings, after they have been subjected to an elevated ambient temperature and cooled to room temperature (hereafter