E09000 - SEMI E90 - 基板トラッキングの仕様 StdTpc-Process Chemicals - Acids SEMI F19 — Specification for

SEMI F19 — Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components

originally published in 1984

transfer of reticles to and from the reticle pods

two or more different PID test specimens (hereafter: test specimens) can be compared quantitatively with respect to their PID-s sensitivity

E09000 - SEMI E90 - 基板トラッキングの仕様 StdTpc-Process Chemicals - Acids SEMI F19 — Specification forNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Subordinate Standards (included): SEMI E90. 1 0312 Specification for SECS II Protocol Substrate Tracking Referenced SEMI Standards (purchase separately) SEMI E30 Specification for the Generic Model for Communications and Control of