F07400 - SEMI F74 - ガス供給システムに使用されるメタルシール設計の性能と評価のためのテスト方法 StdTier-Tier1 1-0306 (technical revision)

1-0306 (technical revision)

The focus of this Document is on geometry-related metrology and measurands important for definition and control of fabrication and inspection operations on structures that include openings for TSV

It is essentially an online version of the Excel-based fab database that is updated with greater frequency with a user-friendly interface

• Equipment recipe components and recipe steps contained in the recipe components as they apply to process modules

F07400 - SEMI F74 - ガス供給システムに使用されるメタルシール設計の性能と評価のためのテスト方法 StdTier-Tier1 1-0306 (technical revision)Referenced SEMI Standards SEMI E49 Guide for High Purity and Ultrahigh Purity Piping Performance Subassemblies, and Final Assemblies SEMI F1 Specification for Leak Integrity of High Purity Gas Piping Systems and Components