E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps Revision:SEMI E74-0301 - Superseded 装置とロードポート群のアクセスモードの切り替え

装置とロードポート群のアクセスモードの切り替え

The scope of this Document covers high purity zirconium amides

structural

The final goal of the Standard is to realize the traceability of semiconductor

E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps Revision:SEMI E74-0301 - Superseded 装置とロードポート群のアクセスモードの切り替えNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the physical and electrical interfaces for turbomolecular pump (TMP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this