E07800 - SEMI E78 - Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment Revision:SEMI E78-0706 - Superseded 装置情報システムによってサポートされるべき役割

装置情報システムによってサポートされるべき役割

This method can also be used for other applications outside of microelectronics

Specification and Guide for Boron Trichloride (BCI3)

the customer may want to reference SEMI M1

E07800 - SEMI E78 - Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment Revision:SEMI E78-0706 - Superseded 装置情報システムによってサポートされるべき役割The purpose of this Guide is to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing equipment. It is a guide for establishing electrostatic compatibility of equipment used in semiconductor manufacturing. Electrostatic compatibility in the entire semiconductor factory is addressed in SEMI E129. Electrostatic surface charge causes a number of undesirable effects in semiconductor