M07400 - SEMI M74 - 直径450mmメカニカルハンドリング鏡面ウェーハの仕様 Revision:SEMI M74-1108 - Superseded SEMI E28-92 (Reapproved 0710)

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SEMI E28-92 (Reapproved 0710)

本仕様にはキャリアIDリーダおよびキャリアIDリーダ／ライタの両方に要求される挙動および通信が含まれる。

This will facilitate comparison of test results among worldwide laboratories used for monitoring or qualifying PV polysilicon and other PV silicon materials

org in March 2010

M07400 - SEMI M74 - 直径450mmメカニカルハンドリング鏡面ウェーハの仕様 Revision:SEMI M74-1108 - Superseded SEMI E28-92 (Reapproved 0710)global Silicon Wafer Committee2008829global Audits and Reviews Subcommittee200810www. semi. org200811CD ROM 450mmAMHS450mm450mm 450mm 5 SISystem International Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M20 Practice for Establishing a Wafer Coordinate System SEMI M59 Terminology for Silicon Technology SEMI MF533 Test Method for Thickness and Thickness Variation of Silicon Wafers SEMI MF928 Test

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