D00600 - SEMI D6 - Specification for Flat Panel Display (FPD) Mask Substrates Revision:SEMI D6-0623 - Current The purpose of this Standard

The purpose of this Standard is to provide a recipe operation mechanism which supports similar with or a superset of current practices in the following aspects for easier deployment

この文書の適用範囲は，測定に使用する方法とすべての設備表面に存在する静電気電荷の最大推奨レベルに関するガイダンスに限定される｡

while still allowing flexibility for product differentiation and technology evolution

the following merits can be expected: Both panel and equipment manufacturers

D00600 - SEMI D6 - Specification for Flat Panel Display (FPD) Mask Substrates Revision:SEMI D6-0623 - Current The purpose of this StandardThis Specification defines the standard for substrates used to fabricate flat panel display masks. This Specification applies to photomasks that are principally used in fabricating flat panel displays. The edge lengths specified range from 202. 8 mm 202. 8 mm to 1620 mm 1780 mm. Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1). Referenced SEMI Standards (purchase separately) SEMI P1