Semiconductor Chemical Safety Part 2: Hazards, Controls and Emergency Actions StdPbc-0324 This document describes the components

This document describes the components and minimum performance criteria for gas source control equipment used with hazardous production material (HPM) semiconductor gases

Alternate methods can be used as long as method validation as per SEMI C1 has been demonstrated

SEMI G81 — Specification for Map Data Items

and measurement techniques are described in this Standard

Semiconductor Chemical Safety Part 2: Hazards, Controls and Emergency Actions StdPbc-0324 This document describes the componentsCourse Description There are many chemicals you may be exposed to in semiconductor fabrication work. Each chemical has specific characteristics, hazards, and safety measures. Take this course to learn what these chemicals are and how to protect yourself. Ideal learners are semiconductor employees. Course Objectives Know about the chemical hazards in semiconductor fabrication facilities. Recognize common hazard controls in semiconductor fabrication