F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes Revision:SEMI F65-1101 - Inactive Parameters such as edge length

Parameters such as edge length and diagonal of a wafer appear to be obvious

provide process resources

This Document provides a common basis for communication between manufacturers and users regarding testing and describing MFC pressure effects

• Equipment and load port access mode switching

F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes Revision:SEMI F65-1101 - Inactive Parameters such as edge lengthThis specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on August 3, 2001. Initially available at www. semi. org September 2001; to be published November 2001. NOTICE: This Standard or Safety Guideline has an Inactive Status because the