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G00600 - SEMI G6 - 検査方法　封止リング平坦度 StdTpc-Physical Interfaces Referenced SEMI StandardsSEMI E4 —

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Referenced SEMI StandardsSEMI E4 — Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

including but not limited to appearance

この文書は，その他の

and tubing as specified in ASTM A269 and ASTM A632

G00600 - SEMI G6 - 検査方法　封止リング平坦度 StdTpc-Physical Interfaces Referenced SEMI StandardsSEMI E4 —38. 382 mm0. 330 8. 382 mm0. 330 Referenced SEMI Standards None.

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