MS00400 - SEMI MS4 - Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance Revision:SEMI MS4-1113 - Superseded SEMI MF1530-02 (first SEMI publication)

SEMI MF1530-02 (first SEMI publication)

高周波発生器およびマッチング回路

originally published in 1992

재료 프로세싱(material processing)의 개념

MS00400 - SEMI MS4 - Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance Revision:SEMI MS4-1113 - Superseded SEMI MF1530-02 (first SEMI publication)The absence of a generally accepted method to determine Youngs modulus has provided a challenge to the microelectromechanical systems (MEMS) community for many years. Without a standard measurement technique, measurements between different laboratories cannot be meaningfully compared. This Standard provides a test method to determine Youngs modulus for thin, reflecting films, based on the average resonance frequency of a single layered cantilever. It