E09900 - SEMI E99 - Specification for Carrier ID Reader/Writer Revision:SEMI E99-0317 - Superseded SEMI E10-0304E (editorial revision)

SEMI E10-0304E (editorial revision)

including those widely used in 300 mm semiconductor factories

the data was obtained following this Guide

1 The scope of the GEM Standard is limited to defining the behavior of semiconductor equipment as viewed through a communications link

E09900 - SEMI E99 - Specification for Carrier ID Reader/Writer Revision:SEMI E99-0317 - Superseded SEMI E10-0304E (editorial revision)The purpose of this Standard effort is to provide a common specification for concepts, behavior, and services (functions) provided by a Carrier ID Reader and a Carrier ID Reader Writer to an upstream controller. A standard interface will increase interchangeability of Carrier ID Reader Writers so that users and equipment suppliers have a wider range of choices. This Standard addresses the functional requirements for a generic Carrier ID Reader Writer