Principles of Plasma Discharges and Materials Processing Central Scotland Sue Carter

Sue Carter

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Principles of Plasma Discharges and Materials Processing Central Scotland Sue CarterA new edition of this industry classic on the principles of plasma processing Plasma based technology and materials processes have been central to the revolution of the last half century in micro and nano electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to plasma deposition for creating solar panels and flat panel displays, plasma based materials processes have reached huge areas of technology. As key