G02300 - SEMI G23 - Test Method of Inductance for Internal Traces of Semiconductor Packages StdPbc-0118 AMHS equipment including AGV

AMHS equipment including AGV

and other relevant information such as tracking reticle usage

This Guide supports the approach by off-line measurement of the contaminants using best available techniques available in the laboratory setting

本スタンダードは，global Flat Panel Display – Factory Automation Committeeで技術的に承認されている。現版は2009年5月13日，global Audits and Reviews Subcommitteeにて発行が承認された。2009年6月にwww

G02300 - SEMI G23 - Test Method of Inductance for Internal Traces of Semiconductor Packages StdPbc-0118 AMHS equipment including AGVThis Test Method describes the measurement method for the inductance of internal traces of semiconductor packages. This Test Method is applicable for the measurement of package inductance that is greater than 0. 5 nH. This Test Method describes the measurement of a pin grid array, one of the package types, as a sample. This Test Method is also applicable to other types of packages. The inductance in this Standard is limited to that of internal traces