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E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Revision:SEMI E54.24-1116 - Superseded carrier management
E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Revision:SEMI E54.24-1116 - Superseded carrier management
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Description
carrier management
SEMI C28-0301 (technical revision)
and test results (e
SEMI E134 — Specification for Data Collection Management
E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) Revision:SEMI E54.24-1116 - Superseded carrier managementThis Standard describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor actuator communication network. This Standard is applicable to sensors which are regarded as data producers only.
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