E03500 - SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment Revision:SEMI E35-0200 - Superseded although reference is made to

although reference is made to the more general case of two-dimensional measurements made over a rectangular array of data points

SEMI M57-1011 (technical revision)

or SEMI M24

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E03500 - SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment Revision:SEMI E35-0200 - Superseded although reference is made toThe purpose of this Guide is to provide standard cost of ownership (COO) metrics for evaluating unit production cost effectiveness of manufacturing equipment in the semiconductor and related industries. This Guide establishes a procedure to facilitate an understanding of equipment related costs, including costs related to environmental, health, and safety (EHS) factors, by providing definitions, classifications, algorithms, methods, and example values