S02000 - SEMI S20 - Safety Guideline for Identification and Documentation of Energy Isolation Devices for Hazardous Energy Control StdPbc-0211 although it may be used

although it may be used as a guideline for melts from blended materials

SEMI MF1388-1106 (technical revision)

The test method is applicable to square or pseudo-square multi- as well as single-crystalline Si wafers with edge length ≥125 mm and with thickness ≥100 µm

このスタンダードの範囲は，装置の動作状態および生産装置の基本的な装置性能をトラッキングするために必要なデータを定義することである。これらの要件は，ホストやオペレータの入力なしに，装置レベルとモジュールレベルでのトラッキングを容易にし，かつホストに状態情報を伝達してシンプルな装置性能のトラッキングを実行することを目的とする。

S02000 - SEMI S20 - Safety Guideline for Identification and Documentation of Energy Isolation Devices for Hazardous Energy Control StdPbc-0211 although it may be usedThis standard was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 29, 2008. It was available at www. semi. org in October 2008. Originally published March 2003. NOTICE: This document was balloted and approved for withdrawal in 2008. This guideline is intended to establish a method for the unique identification of Energy Isolation