P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdPbc-0220 SEMI E87-0301 (technical revision)

SEMI E87-0301 (technical revision)

SEMI F75-0617 (complete rewrite)

The purpose of this standard is twofold: to enable applications software to be developed that can assume the existence of standard concepts

production equipment including process and metrology equipment

P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdPbc-0220 SEMI E87-0301 (technical revision)This checklist was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain