E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded Elongation

Elongation

a basic set of common services (operations) between the FMCS and the FPUs are specified to exchange FPU status information and data

This Standard presents recommendations for content and usability of documentation provided by the equipment supplier to the equipment purchaser for acquisition and use of semiconductor

本スタンダードは，global Gases Committeeで技術的に承認されている。現版は2010年4月30日，global Audits and Reviews Subcommitteeにて発行が承認された。2010年6月にwww

E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded ElongationThe purpose of this Guide is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers (MFCs). The leak integrity of a gas delivery system is important to maintaining product quality and performance. This Guide is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates. This Guide contains definitions