P04500 - SEMI P45 - マスク装置向けジョブデック・データフォーマットの仕様 Revision:SEMI P45-0708 - Superseded This Specification defines the space

This Specification defines the space necessary within a tool with respect to the interface plane

The alphanumeric marking of this Specification is valid for a broad range of wafer products (e

or disposing of it after processing is complete

and communication of thin film data is consistent among various parties who may need to concur on interpretation of the results of a thin film fabrication-process step

P04500 - SEMI P45 - マスク装置向けジョブデック・データフォーマットの仕様 Revision:SEMI P45-0708 - Superseded This Specification defines the spaceglobal Micropatterning Committee2008513global Audits and Reviews Subcommittee20086www. semi. org20087CD ROM20063 MALY Referenced SEMI Standards SEMI P39 OASISTM Open Artwork System Interchange Standard SEMI P44 Specification for Open Artwork System Interchange Standard (OASISTM) Specific to Mask Tools