D06700 - SEMI D67 - Test Method for Antifouling Property and Chemical Resistance of FPD Polarizing Films and Its Materials Revision:SEMI D67-0819 (Reapproved 0924) - Current The purpose of this Document

The purpose of this Document is to provide specifications for silane (SiH4) that is used in the semiconductor industry

SEMI E49-1104 (Reapproved 1211)

ユーザが装置の設計情報を利用できるようにすること，ただしその機密情報が漏洩されないようにすること。

0008 Ω·cm and 6000 Ω·cm

D06700 - SEMI D67 - Test Method for Antifouling Property and Chemical Resistance of FPD Polarizing Films and Its Materials Revision:SEMI D67-0819 (Reapproved 0924) - Current The purpose of this Document1 Purpose 1. 1 This Standard establishes test methods for the antifouling property and chemical resistance of FPD polarizing films and its related materials. 1. 2 These test methods can be applied in research and development, quality control and manufacturing. These test methods are also useful for research and development as well as applicability assessment of cleaning agents for the surface of FPDs. 2 Scope 2. 1 This Standard encompasses the test