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MF207400 - SEMI MF2074 - Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers Revision:SEMI MF2074-0912 (Reapproved 0718) - Superseded SEMI C38 — Guideline for
MF207400 - SEMI MF2074 - Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers Revision:SEMI MF2074-0912 (Reapproved 0718) - Superseded SEMI C38 — Guideline for
$193.00
Description
SEMI C38 — Guideline for Phosphorus Oxychloride
and structural properties of silicon annealed wafers for 180 nm
SEMI C28-0704 (technical revision)
These attributes include electrical
MF207400 - SEMI MF2074 - Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers Revision:SEMI MF2074-0912 (Reapproved 0718) - Superseded SEMI C38 — Guideline forThe diameter of semiconductor wafers is an important parameter in microelectronic fabrication. Wafer diameters must conform to the limits specified in SEMI M1; or other agreed upon limits, or product that is otherwise suitable may not fit correctly in process equipment. Cam follower edge rounding usually results in wafers that are circular. However, wafers ground with edge follower edge rounding equipment may be elliptically shaped. Measurements made
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