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T00200 - SEMI T2 - Specification for Marking of Wafers With a Two Dimensional Dot Matrix StdPbc-0813 注意: 本文書は、2006年、全面的に書き換えられた。

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注意: 本文書は、2006年、全面的に書き換えられた。

The purpose of this Document is to provide specifications for silane (SiH4) that is used in the semiconductor industry

standard mechanical interface (SMIF) pods

Now think about the different types of hazardous energy used to operate that equipment

T00200 - SEMI T2 - Specification for Marking of Wafers With a Two Dimensional Dot Matrix StdPbc-0813 注意: 本文書は、2006年、全面的に書き換えられた。Referenced SEMI Standards

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