M01700 - SEMI M17 - Guide for a Universal Wafer Grid StdPbc-0315 and test methods

and test methods

the filter media characteristic

1 grade nitrogen and argon bulk supply gases

This Standard does not require

M01700 - SEMI M17 - Guide for a Universal Wafer Grid StdPbc-0315 and test methodsMaximum allowable slip and other non uniformly distributed defects are frequently specified when procuring polished and epitaxial silicon wafers. SEMI M62 specifies a maximum allowable fraction of the epitaxial wafer surface area that can contain slip. This Guide provides a design for and guidance for use of a wafer grid that facilitates the determination of the fraction of the wafer surface area covered by observed defects. This Guide defines a grid