E15300 - SEMI E153 - AMHS SEMの仕様（AMHS SEM） Revision:SEMI E153-0310 - Superseded SEMI C93-0522E (editorial change)

SEMI C93-0522E (editorial change)

The purpose of this Specification is to define standard criteria for the alphanumeric marking of round compound semiconductor wafers

1 — High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)

SEMI MF674-0316 (Reapproved 0921)

E15300 - SEMI E153 - AMHS SEMの仕様（AMHS SEM） Revision:SEMI E153-0310 - Superseded SEMI C93-0522E (editorial change)global Information & Control Committee2010120global Audits and Reviews Subcommittee20102www. semi. org200911 AMHSSEMAMHS SEMSEMI E30AMHS SEMAMHS SEMSEMI E84 11GEMSEMI2SECS IISECSTRANSFERTSSC 11GEMAMHS SEMTSSCTRANSFERGEM Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E37 High Speed SECS Message Services