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F02300 - SEMI F23 - グレード10/0.2 引火性特殊ガスの粒子に関する仕様 Revision:SEMI F23-0697 (Reapproved 0712) - Superseded and extensibility
F02300 - SEMI F23 - グレード10/0.2 引火性特殊ガスの粒子に関する仕様 Revision:SEMI F23-0697 (Reapproved 0712) - Superseded and extensibility
$115.50
Description
and extensibility
SEMI PV74-0216 (first published)
Establishing
Additional requirements on the material to be tested are listed in SEMI MF1810
F02300 - SEMI F23 - グレード10/0.2 引火性特殊ガスの粒子に関する仕様 Revision:SEMI F23-0697 (Reapproved 0712) - Superseded and extensibilityglobal Gases Technical Committee2012618global Audits and Reviews Subcommittee20127www. semiviews. org www. semi. org1997620033 10 0. 2 8 105 Pa 88 105 Pa 8 H2 Referenced SEMI Standards SEMI C6. 3 Particle Specification for Grade 20 0. 2 Hydrogen (H2) Delivered as Pipeline Gas
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 - Superseded and extensibility){kind=link}
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