SiC Webinar June 2023 - On Demand StdTpc-Jig ID NOTICE: This document is no
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Description
NOTICE: This document is no longer published with the SEMI E54 suite of standards
• extract the edge profile characteristic parameters by fitting lines or arcs to portions of the measured edge profile at defined distances from the periphery of the wafer and compare them with the specified values
This Specification is intended for use in procurement of polycrystalline silicon for growth of electronic grade monocrystalline silicon ingots
This marking symbol is marked in a manner and location to avoid affecting the user patterning process
SiC Webinar June 2023 - On Demand StdTpc-Jig ID NOTICE: This document is no
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