Electronic Materials Forecast Service StdVol-MEMS SEMI E87-1017 (designation update)
$11000.00
Description
SEMI E87-1017 (designation update)
本仕様は,150 mm/200 mmのポッドについて,ハンドルの寸法と配置を定める。これらは,自動操作であるが,手動操作も考慮している。個々の手動ハンドルの設計は,この基準の寸法的な制限内で完成させることは自由である。
SEMI MF1048-87 (Reapproved 1999) (first SEMI publication)
from defect inspection to semiconductor process metrology
Electronic Materials Forecast Service StdVol-MEMS SEMI E87-1017 (designation update)Semi annual service that provides a 5 year forecast for lithography, advanced deposition, formulated cleans and CMP consumables. Provided in EXCEL format.
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