M02400 - SEMI M24 - Specification for Polished Monocrystalline Silicon Premium Wafers Revision:SEMI M24-0307 - Superseded line dimensions

line dimensions

3の改訂を反映して，の出版サイクルで更新された。

originally published in 1983

SEMI S2-0712c (delayed revision)

M02400 - SEMI M24 - Specification for Polished Monocrystalline Silicon Premium Wafers Revision:SEMI M24-0307 - Superseded line dimensionsThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published in 1994; previously published November 2005. This document specifies requirements for virgin silicon premium wafers with nominal diameter from 150300 mm used for particle counting, metal