E08800 - SEMI E88 - Specification for AMHS Storage SEM (Stocker SEM) StdPbc-1017 This overview Guide provides process

This overview Guide provides process development

originally published in 1987

leadframe manufacturers and mold manufacturers

orgで入手可能となる。初版は1997年発行。前版は2006年9月発行。

E08800 - SEMI E88 - Specification for AMHS Storage SEM (Stocker SEM) StdPbc-1017 This overview Guide provides processThis Standard establishes a Specific Equipment Model (SEM) for AMHS storage equipment (Stocker SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of Stocker SEM equipment into an automated (e. g., semiconductor fabrication and flat panel display) factory.